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dc.creatorBanerjee, Mahima J
dc.date.available2011-02-18T21:49:59Z
dc.date.issued2002-08
dc.identifier.urihttp://hdl.handle.net/2346/17019en_US
dc.description.abstractNot available
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.publisherTexas Tech Universityen_US
dc.subjectRapid thermal processingen_US
dc.subjectChemical vapor depositionen_US
dc.subjectSilicaen_US
dc.subjectCondensationen_US
dc.titleCondensation control on Radiance®300mm and characterization of thermal silicon dioxide
dc.typeThesis
thesis.degree.nameM.S.E.E.
thesis.degree.levelMasters
thesis.degree.grantorTexas Tech University
thesis.degree.departmentElectrical Engineering
dc.rights.availabilityUnrestricted.


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