Sixteen-channel temperature controller
Nallamudi, Sarath Babu
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Temperature is a widely measured quantity in the industry. Accurate and repeatable temperature measurement and control are critical to product quality and uniformity in many modem semiconductor manufacturing processes. Different techniques to measure the temperature are studied. One of such technique to measure temperature with a thermistor whose resistance reduces with the increase in temperature is considered. A circuit is developed to control the temperature in 16 channels and to measure the temperature in all 16 channels each time the temperature is controlled in one channel. The circuit is controlled from the Micro controller named BS2IC. A 6" wafer is processed and a pattern is developed on it in order to glue resistors to control the temperature and to glue thermistors to measure the temperature. The Temperature controller is then connected to this wafer and the controller is tested for its functionality.