Effects of Plasma Treatment on the Ohmic Characteristics of Ti/Al/Ti/Au Contacts to n-AlGaN
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Date
2006-08-25
Authors
Jiang, H.X.
Lin, J.Y.
Li, J.
LeBoeuf, S.F.
Piao, H.
Cao, X.A.
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics