Accelerated testing of a lanthanum-modified lead zirconate titanate capacitor

Date

2011-12

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Abstract

This literature begins by introducing the history of reliability and safety engineering. From here, a statistical foundation is laid with an emphasis on the distribution functions that are often associated with this branch of engineering- specifically as it pertains to semiconductor reliability evaluation. This thesis then goes on to examine the more interesting properties of the PLZT material. A broad discussion of the processing flow of a capacitor that utilizes the PLZT dielectric follows. The text then transitions to a reliability analysis of the aforementioned capacitor. Here, thorough descriptions of all accelerated tests are given-including hardware setups. Later, the results of the tests are presented. Finally, this text concludes with a theoretical interpretation of the results from a reliability perspective; whereby modeling data and acceleration factors are discussed, and an example is given.

Description

Keywords

Semiconductor reliability, Accelerated testing, Wafer level reliability

Citation