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dc.creatorMoldovan, Laszlo
dc.date.available2015-02-09T14:24:32Z
dc.date.issued1993-12
dc.identifier.urihttp://hdl.handle.net/2346/60910
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.subjectSilane -- Safety measures
dc.subjectThin films -- Safety measures
dc.titleDesign of safety system and controls for electron-cyclotron resonance deposition systemen_US
dc.typeThesis
thesis.degree.nameMaster of Science
thesis.degree.levelMasters
thesis.degree.disciplineElectrical Engineering
thesis.degree.grantorTexas Tech University
thesis.degree.departmentElectrical Engineering
dc.rights.availabilityUnrestricted.


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