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dc.contributor.advisorGale, Richard O.
dc.creatorYang, Yang
dc.date.accessioned2017-03-09T14:07:24Z
dc.date.available2017-03-09T14:07:24Z
dc.date.created2014-05
dc.date.issued2014-05-15
dc.date.submittedMay 2014
dc.identifier.urihttp://hdl.handle.net/2346/72454
dc.description.abstractCharged particle detectors are widely used in nuclear physics, astrophysics and environmental monitoring areas. The applications include charged particle spectroscopy, air monitoring, alpha beta counting, etc. This thesis outlines the basics of charged particle detection and spectroscopy. Then the design and fabrication concerns of the silicon-based planar structural detector are covered. After discussion of the process flow, a novel doping profile is proposed at last.
dc.format.mimetypeapplication/pdf
dc.subjectSilicon detector
dc.subjectFabrication
dc.subjectDoping profile
dc.titleFabrication of Silicon-based Planar Structural Charged Particle Detector
dc.typeThesis
dc.date.updated2017-03-09T14:07:24Z
dc.type.materialtext
thesis.degree.nameMaster of Science in Electrical Engineering
thesis.degree.levelMasters
thesis.degree.disciplineElectrical Engineering
thesis.degree.grantorTexas Tech University
thesis.degree.departmentElectrical and Computer Engineering
dc.contributor.committeeMemberLi, Changzhi


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