Supercritical carbon dioxide treatment of photoresists and plasma-damaged nanoporous low-k films

Date

2003-12

Journal Title

Journal ISSN

Volume Title

Publisher

Texas Tech University

Abstract

Not available

Description

Keywords

Dielectric resonators -- Testing, Fourier transform infrared spectroscopy (FTIR), Photoresists -- Experiments, Supercritical fluids, Breakdown (Electricity)

Citation