A web interface design for a plasma etcher
Date
1999-05
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Texas Tech University
Abstract
It is mentioned that the objective of this project is to make a particular semiconductor processing equipment over the Internet but the approach for achieving the objective was made generic so that it can be applied to achieve remote access to any other piece of expensive equipment.
Description
Rights
Availability
Unrestricted.
Keywords
Computer interfaces, Laboratories, Semiconductors, LabVIEW, Plasma etching