Superstructure conductivity in the digital micromirror device (DMDtm)

This paper investigates the distribution of conductivity in the DMD and how process anomalies can lead to a nonlinear response In addition, statistical methods will be used to prove that these process anomalies are present all wafers and all die. Finally, simulations based test data will be used to show how the impact of such nonlinearities affect the operating margin of the DMD.