Structural properties of fluorinated amorphous carbon films

dc.contributor.authorWest, M.en_US
dc.contributor.authorStartham, M.en_US
dc.contributor.authorGangopadhyay, S.en_US
dc.contributor.authorTemkin, H.en_US
dc.contributor.authorBouldin, K.en_US
dc.contributor.authorHarris, H.en_US
dc.contributor.authorWang, X.en_US
dc.date.accessioned2010-11-11T21:22:24Zen_US
dc.date.accessioned2012-05-13T17:54:14Z
dc.date.available2010-11-11T21:22:24Zen_US
dc.date.available2012-05-13T17:54:14Z
dc.date.issued2001-01-01en_US
dc.description.abstractFluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm21 were resolved into ten peaks, which were assigned to various carbon–fluorine and carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated.en
dc.identifier.citationStructural properties of fluorinated amorphous carbon films X. Wang, H. R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M. D. Strathman, and M. West, J. Appl. Phys. 87, 621 (2000), DOI:10.1063/1.371910en
dc.identifier.urihttp://hdl.handle.net/2346/2097en_US
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.relation.ispartofseries87;1en_US
dc.titleStructural properties of fluorinated amorphous carbon filmsen
dc.typeArticleen
ttu.departmentNano Tech Center (NTC)en
ttu.emailShubhra.Gangopadhyay@ttu.eduen

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