Gale, Richard O.2017-03-092017-03-092014-052014-05-15May 2014http://hdl.handle.net/2346/72454Charged particle detectors are widely used in nuclear physics, astrophysics and environmental monitoring areas. The applications include charged particle spectroscopy, air monitoring, alpha beta counting, etc. This thesis outlines the basics of charged particle detection and spectroscopy. Then the design and fabrication concerns of the silicon-based planar structural detector are covered. After discussion of the process flow, a novel doping profile is proposed at last.application/pdfSilicon detectorFabricationDoping profileThesis2017-03-09