Fabrication of Silicon-based Planar Structural Charged Particle Detector
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Charged particle detectors are widely used in nuclear physics, astrophysics and environmental monitoring areas. The applications include charged particle spectroscopy, air monitoring, alpha beta counting, etc. This thesis outlines the basics of charged particle detection and spectroscopy. Then the design and fabrication concerns of the silicon-based planar structural detector are covered. After discussion of the process flow, a novel doping profile is proposed at last.