Structural properties of fluorinated amorphous carbon films

Date

2001-01-01

Authors

West, M.
Startham, M.
Gangopadhyay, S.
Temkin, H.
Bouldin, K.
Harris, H.
Wang, X.

Journal Title

Journal ISSN

Volume Title

Publisher

American Institute of Physics

Abstract

Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm21 were resolved into ten peaks, which were assigned to various carbon–fluorine and carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated.

Description

Keywords

Citation

Structural properties of fluorinated amorphous carbon films X. Wang, H. R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M. D. Strathman, and M. West, J. Appl. Phys. 87, 621 (2000), DOI:10.1063/1.371910

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