Structural properties of fluorinated amorphous carbon films
Date
2001-01-01
Authors
West, M.
Startham, M.
Gangopadhyay, S.
Temkin, H.
Bouldin, K.
Harris, H.
Wang, X.
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics
Abstract
Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm21 were resolved into ten peaks, which were assigned to various carbon–fluorine and carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated.
Description
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Citation
Structural properties of fluorinated amorphous carbon films X. Wang, H. R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M. D. Strathman, and M. West, J. Appl. Phys. 87, 621 (2000), DOI:10.1063/1.371910