A liquid nitrogen cooled vacuum system used for conductivity measurements of hydrogenated amorphous silicon thin films

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1991-12

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Abstract

The objective of this project is to create a support which can measure the dark conductivity photoconductivity of hydrogenated amorphous silicon in thermal cycling period than the current system used in the lab. The system consists of thermal, electrical, vacuum instrumentation which allows the measurement of the conductivity over a temperature of 88 K to 373 K at pressures of less than 10-3 Torr. We find that using this apparatus on measurements on a-Si:H and a-Si:H,Cl yield results which are consistent with those made by others in the field. The construction of this apparatus allows for other experimental set-ups in the lab to be released to perform various other material characterization methods.

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Keywords

Silicon alloys -- Electric properties, Silicon alloys -- Testing, Amorphous substances -- Testing, Vacuum technology

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