Fabrication of Silicon-based Planar Structural Charged Particle Detector
| dc.contributor.advisor | Gale, Richard O. | |
| dc.contributor.committeeMember | Li, Changzhi | |
| dc.creator | Yang, Yang | |
| dc.date.accessioned | 2017-03-09T14:07:24Z | |
| dc.date.available | 2017-03-09T14:07:24Z | |
| dc.date.created | 2014-05 | |
| dc.date.issued | 2014-05-15 | |
| dc.date.submitted | May 2014 | |
| dc.date.updated | 2017-03-09T14:07:24Z | |
| dc.description.abstract | Charged particle detectors are widely used in nuclear physics, astrophysics and environmental monitoring areas. The applications include charged particle spectroscopy, air monitoring, alpha beta counting, etc. This thesis outlines the basics of charged particle detection and spectroscopy. Then the design and fabrication concerns of the silicon-based planar structural detector are covered. After discussion of the process flow, a novel doping profile is proposed at last. | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/2346/72454 | |
| dc.subject | Silicon detector | |
| dc.subject | Fabrication | |
| dc.subject | Doping profile | |
| dc.title | Fabrication of Silicon-based Planar Structural Charged Particle Detector | |
| dc.type | Thesis | |
| dc.type.material | text | |
| thesis.degree.department | Electrical and Computer Engineering | |
| thesis.degree.discipline | Electrical Engineering | |
| thesis.degree.grantor | Texas Tech University | |
| thesis.degree.level | Masters | |
| thesis.degree.name | Master of Science in Electrical Engineering |